SensArray is now the SensArray division of KLA-Tencor
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News & Events

SensArray Introduces PlasmaWafer™ Suite for plasma etch chamber health

Press Release

Products Brochures

Integrated Wafer Brochure arrow

K-T Product
Portfolio Brochure
English, 3.17 MB pdf
KT Portfolio Brochure

Products

1535 Process Probe
Sensor Probe 1430 Sensor Probe
Integrated Systems Integrated Systems
TMAP-IIS5 Real-Time Systems

 

 

 

 

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Solutions

Equipment

bulletpoint Applied Materials bulletpoint Mattson
bulletpoint AKT bulletpoint Metron
bulletpoint ASML bulletpoint Novellus
bulletpoint Dainippon Screen bulletpoint Tegal
bulletpoint FSI bulletpoint Tokyo Electron
bulletpoint LAM Research  

 

Process