Since 1987 SensArray® Corporation has helped semiconductor equipment manufacturers and device makers worldwide achieve success through the use of our many measurement tools and acquisition and analysis systems for process optimization. We offer a complete line of instruments and software for acquiring, analyzing, visualizing, and managing thermal data – and we’re moving into other areas of measurement as well, with probes for humidity and air velocity.

Within our broad range of products, each addresses a different need, and they work together to deliver a robust solution for process optimization. With SensArray solutions, you can measure, record, and characterize wafer temperatures during every part of a process cycle to improve control and uniformity. We offer the tools to help boost device quality and output, optimize run times, tightly control process temperatures, reduce downtime, and lower test wafer consumption. SensArray products can be used for process development and diagnostics, system and process qualification, system matching, and process monitoring. Choose the product or products that are right for your application.

Quality at SensArray extends throughout the organization. The company has been awarded ISO 9001-2000 certification and remains committed to implementing and continuously improving our quality management system. Based in Santa Clara, California, SensArray is privately held and has offices in Japan, Taiwan, and Korea, with international representatives in Asia and Europe. SensArray holds several patents.