The company was originally founded to address the requirements equipment manufacturers had to accurately measure the real wafer temperature during semiconductor fabrication processing. The industry had recognized that although they understood the temperature of the equipment, they didn’t necessarily understand the actual wafer temperature. Knowing such information would turn out to be vital in the technological breakthroughs of many advanced thermal processes, including DUV lithography. Having the ability to know and understand what impacts the wafer temperature across the entire surface, through out the entire cycle, has allowed manufacturers to improve their equipment performance and has provided device manufacturers the ability to manage the critical dimensions across the wafer. SensArray’s first product was a thin film sensor wafer, built for use on a CVD chamber. In late 1987, the company developed the first thermocouple (TC) test wafer that enabled the advancement of RTP systems in the field.