FPO

LOOK INSIDE YOUR PROCESS

SensArray™ measurements for superior process control

SensArray’s instrumented substrates provide a unique way to capture the effect of the process environment on production wafers. SensArray's SensorWafers™ provide wafer-level spatial resolution not available from conventional equipment monitors. SensorWafer measurements, such as temperature and RF voltage, are used by both chipmakers and process equipment manufacturers to visualize, diagnose, and control their processes and process tools.  They are tailored to meet the unique operating range and accuracy requirements of each target application.