SENSARRAY INTRODUCES SENSOR PROBE 1400 SERIES

FREMONT, Calif., January 22, 2002
SensArray® Corporation, the leading provider of real-time thermal measurement solutions for semiconductor fabrication, today introduced the Sensor Probe 1400 series, designed to help customers improve their understanding of thermal conditions throughout their semiconductor fabrication equipment. The Sensor Probe 1400 is available in a variety of configurations for measuring temperature in a multitude of environments.

“Historically, temperature measurement of outside the direct wafer used inaccurate sensors and inconvenient tools and did not help customers understand the correlation of equipment temperature to wafer temperature,” said Mei Sun, vice president, Sensors, SensArray Corporation. “Our new Sensor Probes eliminates this problem with fast, easy and accurate temperature measurement resulting in greater process control. And, combined with our complete product line of temperature measurement systems, customers can now measure wafer temperature in nearly every semiconductor process, while monitoring the temperatures of many critical assemblies inside their fab equipment.”

The Sensor Probe 1400 series is reliable and easy to use, requiring only the time to tape on a probe or insert into the desired area, measure and then remove. The calibrated small tip RTD (resistance temperature detector) probes are designed for use with SensArray’s Thermal TRACK and Thermal MAP systems for enhanced numerical and graphical analysis, and can also be used concurrently with SensArray’s Process Probe instrumented wafers.

Customers choose from a number of sensor tip designs, optimized for various temperature measurement applications. Sensor Probe 1400 has a high absolute accuracy of better than ±0.1°C and sensor to sensor interchangeability of 0.1°C and is suitable for environments with temperatures up to 230°C. The product can be used in wet or dry environments and is compatible with a variety of liquid media, including DI water, IPA and photoresist. For further product details, visit www.sensarray.com.

Designed for collecting and analyzing thermal data critical to the manufacturing of semiconductor and LCD display processes, SensArray products and services help customers acquire the best possible reproducibility, process optimization and yield associated with fabrication equipment. SensArray’s products range from wafers instrumented with arrays of temperature sensors, to complete integrated measurement systems.