SENSARRAY INTRODUCES SENSOR PROBE 1410 FOR HUMIDITY AND AIRFLOW MEASUREMENT

FREMONT, Calif., July 18, 2002
SensArray® Corporation, a leading provider of wafer state measurement solutions for semiconductor fabrication, today announced availability of Sensor Probe 1410 for humidity and airflow for lithography track applications. Combined with SensArray’s temperature measurement tools, Sensor Probe 1410 enhances customers’ ability to tightly control environmental parameters by measuring temperature, humidity and airflow simultaneously.

“The Sensor Probe 1410 marks an expansion of SensArray’s business by leveraging our temperature measurement expertise in the development of wafer state sensor measurement tools,” said Wayne Renken, president and CEO, SensArray. “Driven by customer needs, we’ve developed the Sensor Probe 1410 to increase the level of success and accuracy in our customers’ lithography process and equipment.”

As IC control budget shrink from 6.5 nm in 2002 to 2.6 nm in 2007, calculating every environmental parameter is critical to the success of semiconductor fabrication processing. The Sensor Probe 1410 is highly accurate, measuring within ±1 percent for humidity at a range of 10 to 80 percent relative humidity and within ± 2 percent for airflow ranging from 0 to 1000 feet per minute. Also available is the Sensor Probe 1410 for temperatures ranging from 0°C to 230°C with accuracy of ±0.1°C. Used with SensArray’s Thermal TRACK 4 analysis system, customers gain valuable wafer state measurement data real-time.

Designed for collecting and analyzing data critical to the manufacturing of semiconductor and LCD display processes, SensArray products and services help customers acquire the best possible reproducibility, process optimization and yield associated with fabrication equipment. SensArray’s products range from wafers instrumented with arrays of temperature, humidity and airflow sensors, to complete integrated measurement systems.

Sensor Probe 1410 is currently available in the United States, Europe and Asia.
To request additional information or to order the Sensor Probe 1410, please contact SensArray Corporation at 510-360-5600 or visit the web site at www.sensarray.com.