SENSARRAY EXPANDS PROCESS OPTIMIZATION SOLUTIONS FOR
FLAT PANEL DISPLAY MANUFACTURING

Versatile Temperature Sensor Products Meet Changing Glass Panel Processing Requirements

FREMONT, Calif., June 28, 2004
SensArray® Corporation, an innovative provider of process optimization tools for flat panel and semiconductor fabrication, today announced the expansion of its line of sensor products for measuring real-time, in situ temperature in many critical flat panel display (FPD) process applications. The Process Probe® 2055 and Process Probe 2070 complement the existing line of SensArray process optimization tools for liquid crystal display (LCD) manufacturing, offering customers a set of versatile solutions for ensuring uniform process results across any size glass panel.

As consumer demand for flat panel displays continues to rise, manufacturers are confronted with the increasing need to lower costs, while producing more reliable, higher quality products. Yet the increasing size of new-generation flat panel glass amplifies the potential for problems, such as uneven film deposition and etching, due to temperature non-uniformity during critical processes. Utilizing advanced bonding techniques and materials, the two newest temperature measurement tools from SensArray offer flexible, easy-to-use solutions for performing precise, in situ characterization of glass temperature profiles.

The configurable Process Probe 2055 consists of thermocouple (TC) sensors embedded in small glass chips that can be placed anywhere on the customer’s glass panel or within the process chamber. Options add to the versatility of the product – detachable sensors can be placed anywhere, even on chamber walls, and later removed and reused; and heat resistant lead insulation allows for monitoring at temperatures over 450°C.

The Process Probe 2070 is comprised of multiple instrumented glass tiles – typically 4” x 4” – which replace a single large glass panel, allowing easy placement of the thermocouple sensors at desired locations on the susceptor within the process chamber. The flexible product design also makes field repair of the product possible when additional sensors are bundled in with the instrumented glass tiles.

The new, patented bonding method used in both the Process Probe 2070 and the non-detachable sensors of the Process Probe 2055 ensures high repeatability across the glass. The TC is embedded in one side of a chip, which is then securely bonded to a glass panel or tile. The leads are positioned underneath the chip, providing protection for the leads and added durability for the product. The advanced ceramic bonding material used offers high thermal conductivity, maintains its strength at high temperatures, and is extremely tolerant of thermal shock.

“The rapid growth of the flat panel display industry is presenting new challenges for equipment and display manufacturers,” said Mei Sun, vice president, sensor engineering, SensArray. “The Process Probe 2055 and 2070 address the problems of instrumenting large glass panels, making it easier and less expensive for customers to fine-tune their most critical and complex processes, resulting in higher yields and better quality products.”

The Process Probe 2055 and Process Probe 2070 are based on proven SensArray technology, and provide reliable performance with NIST-traceable accuracy of ± 1.1°C or ± 0.4% of the reading in an isothermal chamber. Both products operate over a wide temperature range of 0° to 600+°C, with up to 34 sensors bundled onto a flat cable. Temperature measurements are acquired using a SensArray hand-held Thermal TRACK™ measurement system or Thermal MAP® metrology system with advanced analysis features.

The new SensArray FPD products complement other SensArray process optimization tools already in use by flat panel display equipment manufacturers. They include: the Process Probe 2030 factory-instrumented glass for highly accurate measurements of fourth generation or smaller glass panels, the Process Probe 2050 sensor bearing template for field instrumentation of large panels, Sensor Probe 1410 resistance temperature detector (RTD) sensors for high precision measurements from 0° to 200°C, and APTI Process Probe 2270 peak temperature indicators for environmentally challenging applications from 40° to 185°C.

The Process Probe 2055 and Process Probe 2070 are currently available in the United States, Europe, and Asia. To request additional information or to order the product, please contact SensArray Corporation at 510-360-5600 or visit www.sensarray.com.

About SensArray

SensArray is an innovative provider of process optimization tools for semiconductor and flat panel fabrication. SensArray solutions for dynamic and static optimization allow manufacturers to manage equipment and processing environments, and provide increased control of critical parameters during manufacturing. By optimizing fabrication processes, SensArray products help to make processes more reliable, providing for improved output, and the more economic manufacture of high performance products.

Based in Fremont, California, SensArray is privately held and has offices in Japan, Taiwan, and Korea, with international representatives in Asia and Europe. SensArray is ISO 9001-2000 certified. For additional information about SensArray and its products, please visit www.sensarray.com.