SENSARRAY BROADENS SOLUTIONS FOR TEMPERATURE MEASUREMENT IN PLASMA AND WET ENVIRONMENTS

Inert Peak Temperature Indicator Product Line Expands to
Higher Temperature and Flat Panel Display Applications

FREMONT, Calif., June 28, 2004
SensArray® Corporation, an innovative provider of process optimization tools for flat panel and semiconductor fabrication, today announced that is has broadened its APTI (Array of Peak Temperature Indicators) product line, which is uniquely suited for measuring in situ temperature in plasma, wet and other environmentally challenging process applications.

SensArray has enhanced its existing APTI Process Probe 2210/2230 instrumented wafers for semiconductor applications to increase the maximum temperature range to 185°C. This new capability allows for a wider range of applications, including, low K etch, wet processes, copper deposition, physical vapor deposition (PVD), and implant. Embedded with non-reversible temperature indicators, APTI wafers can accurately indicate peak temperature within 3 mm of the wafer edge, helping to determine edge to center temperature profiles, which can critically affect etch process uniformity.

The newest addition to the APTI product line are APTI buttons (Process Probe 2270). Up to 25 peak temperature indicators are embedded in a small piece of silicon and sealed under a sapphire cover. Each button can be attached to a substrate or a chamber wall for measuring peak temperature. Temperature data can be used for determining temperature uniformity in both semiconductor and flat panel display applications, including plasma etch, wet processes, PVD, and ash. Any number of sensor buttons can be applied to the substrate, making them well suited for collecting temperature data from the large glass panels used in flat panel display applications.

“We regularly talk with our customers about the metrology tools that they need to successfully produce high-quality products,” said Mei Sun, vice president, sensor engineering, SensArray. “Our new APTI products reflect the evolving temperature measurement needs of our customers working in challenging process environments in both the semiconductor and flat panel display markets. They are a far superior alternative to the temperature tape methods often employed in these processes, helping to ensure better output from the fab.”

APTI products do not contain electrically conductive components, and with the sensors sealed from the process environment by a sapphire window, these inert products are ideally suited for plasma, and other processes that present environmental challenges. All process chemistries can be used without risk of degrading measurement accuracy. In plasma, high power densities and vacuum can be tolerated without calibration shift.

With no leads, APTI products are auto-loadable, allowing for convenient testing without taking the system off-line or opening the chamber to the ambient environment. Indicators permanently change from white to black within two to three seconds of exposure, and can easily be read visually.

APTI products offer repeatability of better than ±3°C under any process conditions, which is significantly better than temperature tape methods. The tape often presents erroneous data resulting from improper or inconsistent application. Ballooning and burning of indicator packaging in the vacuum are completely eliminated when using APTI peak temperature indicators. APTI products can indicate temperatures ranging from 40° to 185°C.

APTI wafers and APTI buttons are currently available in the United States, Europe, and Asia. To request additional information or to order the product, please contact SensArray Corporation at 510-360-5600 or visit www.sensarray.com.

About SensArray

SensArray is an innovative provider of process optimization tools for semiconductor and flat panel fabrication. SensArray solutions for dynamic and static optimization allow manufacturers to manage equipment and processing environments, and provide increased control of critical parameters during manufacturing. By optimizing fabrication processes, SensArray products help to make processes more reliable, providing for improved output, and the more economic manufacture of high performance products.

Based in Fremont, California, SensArray is privately held and has offices in Japan, Taiwan, and Korea, with international representatives in Asia and Europe. SensArray is ISO 9001-2000 certified. For additional information about SensArray and its products, please visit www.sensarray.com.