Recent Press Releases

December 17, 2007
SensArray Introduces PlasmaWafer™ Suite for plasma etch chamber health

July 12, 2006
SensArray Introduces Integral Wafer for Flasma, Wet and Planarization Processes

Aug 10, 2005
SensArray Addresses Temperature Control and Optimization Needs In Backend Processes

December 20, 2004
SensArray Introduces Process Optimization Solutions for Solder Reflow Applications

July 6, 2004
SensArray Announces Wireless Temperature Metrology System for Production Surveys

June 28, 2004
SensArray Expands Process Optimization Solutions for Flat Panel Display Manufacturing

June 28, 2004
SensArray Broadens Solutions for Temperature Measurement in Plasma and Wet Environments

February 2, 2004
SensArray Introduces Industry’s First Field Installable Sensors for Flat Panel Display Process Optimization

December 3, 2003
SensArray Introduces Accura°C Robot Loadable Temperature Metrology System for Advanced Lithography Tracks

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