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The wireless Integrated Wafer system is a unique tool for monitoring and maintaining your semiconductor manufacturing processes. Without disrupting production, this low profile wafer can travel through your equipment gathering critical thermal data. With components embedded in the silicon wafer, Integrated Wafer produces a thermal mass and dynamic response equivalent to that of a product wafer. These advanced features, and the high sensor count, make the Integrated Wafer ideal for measuring critical hot plate heating zone elements in advanced lithography applications from 15° to 145°C with ± 0.05°C accuracy at a variety of process stages.

The Integrated Wafer operates from a base station that provides for communications and battery charging. Integrated into standard fab equipment, the base station enables the Integrated Wafer to be deployed robotically, easily traveling through the fab with limited contamination risk.

Integrated Wafer data files are fully compatible with SensArray Thermal MAP® Analysis software. This powerful software leverages graphic data and statistical tools providing a deeper and more comprehensive understanding of the thermal environment within production equipment, enabling you to implement long-term optimizations to your processes.