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Because we never
want our customers to be simply satisfied,
SensArray in always working to innovate
improvements to our offerings and revolutionize
the area of process optimization, whether
it’s through the development of
new technologies, techniques, or processes.
Here’s a sneak peek at the process
optimizations tools coming up next from SensArray. More details
will follow when this product is released.
OP-T-MAP Software with TrackTUNE™– currently
in beta development stage
The newest process optimization software
package from SensArray offers the ability
to tune your advanced lithography track
to the highest uniformity available. After
acquiring zone temperature, controller
power, and wafer temperature using the
Integrated Wafer, the software designs
an ideal control model of your plate, and
computes offsets for you to enter back
into your litho track.
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