SensArray Process Probe® instrumented substrates allow you to accurately measure temperatures in real time in many semiconductor and flat panel display fabrication processes, including lithography, etch, deposition, and solder reflow. Each Process Probe is custom made to meet your specific application needs. You specify the substrate, the size, the number and location of sensors, and the length of the lead. We can even instrument sensors into a substrate that you supply.

Instrumented Wafers for Semiconductor Front-end Applications

For front-end semiconductor applications, we offer a variety of sensor types to provide precise measurements in almost any environment, including thermocouple (TC), resistance temperature detector (RTD), fiber optic or peak temperature indicators. Our wide array of Process Probe wafers can measure temperatures from -150° to 1100°C, helping you to optimize control parameters in nearly any process, ultimately producing a higher output from your fab.

Instrumented Wafers for Semiconductor Back-end Applications

SensArray offers TC-instrumented wafers, leadframes, strips and PCBs to address the temperature measurement needs of traditional back-end semiconductor applications. These Process Probe substrates can measure temperatures from 0° to 800°C, allowing you to measure and maintain uniform process results in solder reflow ovens, staying within the narrow process window imposed by no-lead solder.

Instrumented Glass for Flat Panel Applications

As the size of the glass for flat panel applications increases, so does the flexibility of the temperature measurement solutions from SensArray. We offer options for instrumentation of glass panels with TC sensors at our site or at yours, eliminating the cost and inconvenience of shipping the large, fragile glass panels to our factory.

SensArray Solutions

For help determining the right product for your application please review our Process Guide and Equipment Guide. Or you can review each product by clicking on the links to the left.