Since 1987 SensArray Corporation has helped semiconductor and flat panel equipment manufacturers and device makers worldwide achieve success through the use of our many measurement and analysis tools for process optimization.

We offer a complete line of Process Probe® instrumented substrates and acquisition and analysis systems for acquiring, analyzing, visualizing, and managing thermal data – and we’re moving into other areas of measurement as well, with our Sensor Probes for measuring humidity and air velocity, as well as chamber surface and liquid temperatures.

Our latest technology advancement—the Integrated Wafer System—incorporates a complete temperature metrology system within a wafer. Responding like a production wafer, it gathers data throughout your equipment, allowing you to map and optimize your entire semiconductor manufacturing process.

Within our broad range of products, each addresses a different need, and they work together to deliver a robust solution for process optimization. With SensArray solutions, you can measure, record, and characterize substrate temperatures during every part of a process cycle to improve control and uniformity. We offer the tools to help boost device quality and output, optimize run times, tightly control process temperatures, reduce downtime, and lower the consumption of test substrates. SensArray products can be used for process development and diagnostics, system and process qualification, system matching, and process monitoring. Choose the product or products that are right for your application. If you need assistance, please contact us.