System State Probes for Temperature, Humidity, and Air Velocity Measurement

The Sensor Probe system states to be measured with superior accuracy, precision, and repeatability, allowing for better process control. The benefits of multiple levels of control realized by the use of the combined Sensor Probes will make them an essential part of your process optimization routine.

• Replace multiple, low accuracy systems with an all-in-one, highly accurate measurement suite for temperature, humidity, and airflow.
• Choose a variety of combinations of temperature, humidity, and air velocity probes, all on one connector, for up to 17 channels.
• Quick, easy, portable and flexible – just place the measurement probes anywhere, measure and remove.
• For use with the SensArray Thermal TRACK measurement system to understand the effects of temperature, humidity, and airflow on process results.
• Complements SensArray wafer temperature measurement systems, offering more complete process data for optimization of your entire fab environment.

Highly accurate system state measurements can greatly improve your overall process control and optimization. Previously, these types of measurements have required the use of separate measurement devices that were not very accurate and did not provide consistently repeatable data. Now, the SensArray Sensor Probe™ 1400 series measurement suite offers the unique benefit of combining highly accurate and repeatable real-time measurements of temperature, humidity, and airflow simultaneously on a SensArray Thermal TRACK™ hand-held measurement system. A Thermal TRACK measurement system from SensArray is required for use with the Sensor Probe 1400 series.