Robot loadable process optimization tool for advanced lithography track systems

Extract the maximum potential from your lithography track equipment with AccuraºC™. This unique, robot loadable system offers real-time process optimization of advanced track systems with two or more robot arms

Moving through your equipment like a process wafer, AccuraºC enables accurate temperature mapping of the entire bake sequence, helping you to greatly improve the stability and reliability of your lithography equipment, producing more consistent high-performance products.

AccuraºC provides highly accurate transient and steady state temperature measurements and delivers the data instantly to your PC via a Bluetooth™ wireless RF link, allowing for immediate visualization of the process using SensArray Thermal MAP® Analysis software.

Use the AccuraºC metrology system to obtain the next level of performance from your lithography equipment.