SensArray systems provide you with powerful tools to easily acquire and analyze process data, making your optimization routine as simple as possible in a variety of applications.

Advanced, wireless ISIS 5 hardware offers portability and convenience. Using the compact Thermal TRACK Metrology System, you can measure, track, and review data effortlessly on a PDA. Or, use our intelligent Thermal MAP temperature metrology system, to acquire and analyze data with outstanding accuracy, precision, and resolution for transient and steady state measurements.

The AccuraºC Metrology System with integrated Thermal MAP Analysis software allows you to get the most out of your advanced lithography track systems with two robot arms, delivering highly accurate, real-time data for dynamic and static state temperature measurements.

For in situ wafer temperature measurement in plasma and CVD applications, use APTOS, the most advanced fiber optic-based system available. With integrated Thermal MAP Analysis software, APTOS captures and analyzes thermal data to help you refine process parameters and to use fabrication equipment more effectively.