SensArray products are customized to fit the needs of nearly all semiconductor processes. Each combination requires a very specific Process Probe wafer due to the varying temperatures, chemistries, and build of the chamber. By selecting the process area that you work in, you'll be able to find the SensArray solution that is right for you!

 

Anisotropic Plasma Etch	MCVD / MOCVD
Atmospheric & Belt CVD	Ovens
Downstream Plasma Etch/Strip	PECVD
EPI Processing	Photoresist Track Systems
Flat Panel Substrates	Plasma Strip w/Bias Potential
Hot Wall	Prober Hot Plates & Chillers
ION Implantation Systems	PVD
LPCVD Hot Wall	RTP
LPCVD/SACVD Cold Wall	Solder Reflow
	Spin-on Dielectric