Solution

 

 

 

 

Call toll-free

Have question

 

Spin-on Dielectric

 

Process Probe 1530 Process Probe 1850

Process Probe 1530

  • Measure hot plate and chill plate uniformity
  • Examine thermal transitions between plates
  • Determine purge influence on wafer temperature

Process Probe 1850

  • Measure hot plate and chill plate uniformity
  • Examine thermal transitions between plates
  • Determine purge influence on wafer temperature

 

Other Processes Supported
1530 PVD 2140 SOD
MCVD/MOCVD    
EPI    
  PECVD    
  LPCVD/SACVD  
  SOD